Accession Number PB92-123066
Title Use of Solid Modeling in the Design of M3 Components.
Publication Date Sep 1991
Media Count 35p
Personal Author A. B. Feeney P. F. Brown
Abstract The paper documents the work done for the Molecular Measuring Machine (M3) Project by the Engineering Design Laboratory (EDL) at NIST. The M3 Project is developing and fabricating a device capable of making repeatable measurements of atomic scale features ...
Keywords Computer aided design
Coordinate measuring machines
Dynamic control
M3 project
Mass
Metrology
Microelectronics
Molecular measuring machines
Nanotechnology
Solid modeling
Vibration isolators
 
Source Agency National Institute of Standards and Technology
NTIS Subject Category 41J - Tooling, Machinery, & Tools
94F - Tooling, Machinery, & Tools
Corporate Author National Inst. of Standards and Technology (NEL), Gaithersburg, MD. Factory Automation Systems Div.
Document Type Technical report
Title Note N/A
NTIS Issue Number 9205
Contract Number N/A

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