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Accession Number
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PB2006-114750
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Title
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Semiconductor Microelectronics and Nanoelectronics Programs, July 2006.
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Publication Date
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Jul 2006
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Media Count
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234p
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Personal Author
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N/A
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Abstract
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The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The Nation ...
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Keywords
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Characterization
Design
Lithography
Manufacturing
Measurements
Metrology
Microelectronics
Nanotechnology
Research programs
Semiconductor devices
Standards
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Source Agency
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National Institute of Standards and Technology
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NTIS Subject Category
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49H - Semiconductor Devices
71 - Materials Sciences
46 - Physics
70E - Research Program Administration & Technology Transfer
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Corporate Author
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National Inst. of Standards and Technology, Gaithersburg, MD.
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Document Type
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Technical report
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Title Note
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N/A
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NTIS Issue Number
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0623
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Contract Number
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N/A
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