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Accession Number PB2006-114750
Title Semiconductor Microelectronics and Nanoelectronics Programs, July 2006.
Publication Date Jul 2006
Media Count 234p
Personal Author N/A
Abstract The microelectronics industry supplies vital components to the electronics industry and to the U.S. economy, enabling rapid improvements in productivity and in new high technology growth industries such as electronic commerce and biotechnology. The Nation ...
Keywords Characterization
Design
Lithography
Manufacturing
Measurements
Metrology
Microelectronics
Nanotechnology
Research programs
Semiconductor devices
Standards


 
Source Agency National Institute of Standards and Technology
NTIS Subject Category 49H - Semiconductor Devices
71 - Materials Sciences
46 - Physics
70E - Research Program Administration & Technology Transfer
Corporate Author National Inst. of Standards and Technology, Gaithersburg, MD.
Document Type Technical report
Title Note N/A
NTIS Issue Number 0623
Contract Number N/A

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