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Charged particle detectors based on high quality amorphous silicon deposited with hydrogen or helium dilution of silane.
Lawrence Berkeley Lab., CA.

ProductType: Conference proceedings
NTIS Order Number: DE95004671



 
Media Count: N/A
Date: Nov 1994
Author: W. S. Hong J. S. Drewery T. Jing H. K. Lee S. N. Kaplan

Electrical transport properties of the authors PECVD a-Si:H material has been improved by using hydrogen and/or helium dilution of silane and lower substrate temperature for deposition. For hydrogen-diluted material they have measured electron and hole mo ...

Report Number: LBL-36287 CONF-941061-14
Contract Number: AC03-76SF00098
Project Number: N/A
Grant Number: N/A
Task Number: N/A
NTIS announcement issue: 9512

"N/A" indicates no data is available for this field.