Accession Number DE2012-1054759
Title UV Laser Ablation of Parylene Films from Gold Substrates.
Publication Date Nov 2009
Media Count 15p
Personal Author J. M. Wrobel M. B. Kruger O. R. Musaev P. Scott
Abstract Parylene films, coating gold substrates, were removed by laser ablation using 248 nm light from an excimer laser. Each sample was processed by a different number of pulses in one of three different environments: air at atmospheric pressure, nitrogen at atmospheric pressure, and vacuum. The laser-induced craters were analyzed by optical microscopy and x-ray photoelectron spectroscopy. Multi-pulse ablation thresholds of gold and parylene were estimated.
Keywords Ablation
Air
Atmospheric pressure
Gold
Laser ablation
Lasers
Light
Nitrogen
Optical microscopy
Parylene films
Polymers
Pulses
Spectroscopy
Substrates


 
Source Agency Technical Information Center Oak Ridge Tennessee
NTIS Subject Category 46 - Physics
71N - Nonferrous Metals & Alloys
99C - Polymer Chemistry
Corporate Author National Nuclear Security Administration, Kansas City, MO. Kansas City Plant.
Document Type Technical report
Title Note N/A
NTIS Issue Number 1308
Contract Number DE-AC04-01AL66850

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