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Accession Number
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DE2012-1054759
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Title
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UV Laser Ablation of Parylene Films from Gold Substrates.
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Publication Date
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Nov 2009
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Media Count
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15p
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Personal Author
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J. M. Wrobel M. B. Kruger O. R. Musaev P. Scott
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Abstract
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Parylene films, coating gold substrates, were removed by laser ablation using 248 nm light from an excimer laser. Each sample was processed by a different number of pulses in one of three different environments: air at atmospheric pressure, nitrogen at atmospheric pressure, and vacuum. The laser-induced craters were analyzed by optical microscopy and x-ray photoelectron spectroscopy. Multi-pulse ablation thresholds of gold and parylene were estimated.
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Keywords
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Ablation
Air
Atmospheric pressure
Gold
Laser ablation
Lasers
Light
Nitrogen
Optical microscopy
Parylene films
Polymers
Pulses
Spectroscopy
Substrates
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Source Agency
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Technical Information Center Oak Ridge Tennessee
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NTIS Subject Category
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46 - Physics
71N - Nonferrous Metals & Alloys
99C - Polymer Chemistry
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Corporate Author
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National Nuclear Security Administration, Kansas City, MO. Kansas City Plant.
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Document Type
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Technical report
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Title Note
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N/A
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NTIS Issue Number
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1308
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Contract Number
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DE-AC04-01AL66850
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