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Accession Number
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DE2012-1051896
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Title
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New Approaches for Passivation of Crystalline and Amorphous Silicon.
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Publication Date
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Sep 2012
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Media Count
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3p
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Personal Author
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N/A
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Abstract
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New approaches of passivating crystalline, multicrystalline, and amorphous silicon will be explored. These will include the use of aqueous solution of KCN and a proprietary composition formulated by Mallinckrodt Baker, Inc. The surface passivation will be compared with that provided by an iodine-ethanol solution, and bulk passivation will be compared with that of H-passivation obtained by silicon nitride, in a fire-through process. This work determined that KCN-based aqueous solution provided a good passivation if the wafer has a thin oxide layer. In the absence of the oxide, KCN passivation was not effective.
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Keywords
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Amphorous materials
Aqueous solution
Chemical composition
Crystalline silicon
Ethanols
Oxides
Passivity
Silicon nitrides
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Source Agency
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Technical Information Center Oak Ridge Tennessee
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NTIS Subject Category
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97N - Solar Energy
71 - Materials Sciences
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Corporate Author
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National Renewable Energy Lab., Golden, CO.
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Document Type
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Technical report
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Title Note
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N/A
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NTIS Issue Number
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1306
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Contract Number
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N/A
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