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Accession Number DE2012-1051896
Title New Approaches for Passivation of Crystalline and Amorphous Silicon.
Publication Date Sep 2012
Media Count 3p
Personal Author N/A
Abstract New approaches of passivating crystalline, multicrystalline, and amorphous silicon will be explored. These will include the use of aqueous solution of KCN and a proprietary composition formulated by Mallinckrodt Baker, Inc. The surface passivation will be compared with that provided by an iodine-ethanol solution, and bulk passivation will be compared with that of H-passivation obtained by silicon nitride, in a fire-through process. This work determined that KCN-based aqueous solution provided a good passivation if the wafer has a thin oxide layer. In the absence of the oxide, KCN passivation was not effective.
Keywords Amphorous materials
Aqueous solution
Chemical composition
Crystalline silicon
Ethanols
Oxides
Passivity
Silicon nitrides

 
Source Agency Technical Information Center Oak Ridge Tennessee
NTIS Subject Category 97N - Solar Energy
71 - Materials Sciences
Corporate Author National Renewable Energy Lab., Golden, CO.
Document Type Technical report
Title Note N/A
NTIS Issue Number 1306
Contract Number N/A

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