Accession Number DE2012-1045926
Title Fabrication and Characterization of Ultra-High Resolution Multilayer-Coated Blazed Gratings.
Publication Date 2012
Media Count 8p
Personal Author D. L. Voronov E. H. Anderson E. M. Gullikson F. Salmassi H. A. Padmore R. Cambie S. Dhuey T. Warwick V. V. Yashchuk
Abstract Multilayer coated blazed gratings with high groove density are the most promising candidate for ultra-high resolution soft x-ray spectroscopy. They combine the ability of blazed gratings to concentrate almost all diffraction energy in a desired high diffraction order with high reflectance soft x-ray multilayers. However in order to realize this potential, the grating fabrication process should provide a near perfect groove profile with an extremely smooth surface of the blazed facets. Here we report on successful fabrication and testing of ultra-dense saw-tooth substrates with 5,000 and 10,000 lines/mm.
Keywords Diffraction gratings
Fabrication
Resolution
Substrates
Testing
X-ray spectroscopy


 
Source Agency Technical Information Center Oak Ridge Tennessee
NTIS Subject Category 46 - Physics
77E - Nuclear Instrumentation
Corporate Author Lawrence Berkeley National Lab., CA.
Document Type Technical report
Title Note N/A
NTIS Issue Number 1226
Contract Number DE-AC02-05CH11231

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