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Formation of Nanometer-Scale Contacts to Viscoelastic Materials. - Technical rept.
Naval Research Lab., Washington, DC.

ProductType: Technical report
NTIS Order Number: ADA462096




 
Media Count: N/A
Date: 2007
Author: K. J. Wahl W. N. Unertl

The making and breaking of nanometer-scale contacts is an essential operation in MEMS devices with moving parts. The behavior of contacts in this size range is not well understood, especially if viscoelastic materials are involved. This article describes ...

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NTIS announcement issue: 0713

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