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Accession Number ADA462096
Title Formation of Nanometer-Scale Contacts to Viscoelastic Materials.
Publication Date 2007
Media Count 12p
Personal Author K. J. Wahl W. N. Unertl
Abstract The making and breaking of nanometer-scale contacts is an essential operation in MEMS devices with moving parts. The behavior of contacts in this size range is not well understood, especially if viscoelastic materials are involved. This article describes ...
Keywords Adhesion
Mechanical components
Microelectromechanical systems
Nanometer-scale contacts
Shear modulation spectroscopy

Source Agency Non Paid ADAS
NTIS Subject Category 49 - Electrotechnology
46E - Structural Mechanics
Corporate Author Naval Research Lab., Washington, DC.
Document Type Technical report
Title Note Technical rept.
NTIS Issue Number 0713
Contract Number N/A

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